Controllable electromechanical stability of a torsional micromirror actuator with piezoelectric composite structure under capillary force

Mingjia Liu, Yonglin Chen, Wen Cheng, Siyu Chen, Tao Yu, Weidong Yang

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Abstract


Various types of micro/nano functional devices are being widely designed as optical switches, micro scanners, micromirrors and other core optical devices. The continuing miniaturization of the functional devices makes the size dependence of electromechanical property significant in micro/nano scale due to the sharp increase of surface interactions such as capillary force from liquid bridge, van der Waals and Casimir forces from quantum fluctuations. The surface interactions can cause the pull-in instability, adhesion between parts, and even failure of device. This work provides an active control method to avoid the pull-in instability of an electrostatically driven circular micromirror by applying voltage on a torsional piezoelectric composite structure. The influences of the three types are compared of dispersion forces on the electromechanical stability of the micromirror actuator. A comprehensive electromechanical model of a torsional piezoelectric beam was established to numerically investigate the electromechanical coupling of the micromirror. The results show that the influence of capillary force on the stability of the micromirror is as significant as van der Waals force and Casimir force. By introducing piezoelectric nanoplates into the laminated torsional structure, the micromirror stability can be controlled based on the piezoelectric effect of the torsional piezoelectric composite structure. This work can contribute to the structural optimization design and manufacture of micromirror systems.

Cited as: Liu, M., Chen, Y., Cheng, W., Chen, S., Yu, T., Yang, W. Controllable electromechanical stability of a torsional micromirror actuator with piezoelectric composite structure under capillary force. Capillarity, 2022, 5(3): 51-64. https://doi.org/10.46690/capi.2022.03.02


Keywords


Micromirror actuator, capillary force, pull-in instability, torsional piezoelectric composite

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References


Afrang, S., Mobki, H., Hassanzadeh, M., et al. Design and simulation of a MEMS analog micro-mirror with improved rotation angle. Microsystem Technologies, 2019, 25(3): 1099-1109.

Bhojawala, V. M., Vakharia, D. P. Closed-form relation to predict static pull-in voltage of an electrostatically actuated clamped-clamped microbeam under the effect of Casimir force. Acta Mechanica, 2017, 228(7): 2583-2602.

Bhojawala, V. M., Vakharia, D. P. Investigation on pull-in voltage, frequency tuning and frequency stability of mems devices incorporating Casimir force with correction for finite conductivity. Journal of Vibration Engineering & Technologies, 2020, 8(6): 959-975.

Cai, J., Chen, Y., Yang, L., et al. Capillary imbibition and flow of wetting liquid in irregular capillaries: A 100-year review. Advances in Colloid and Interface Science, 2022, 304: 102654.

Cai, J., Jin, T., Kou, J., et al. Lucas–washburn equation-based modeling of capillary-driven flow in porous systems. Langmuir, 2021, 37(5): 1623-1636.

Chang, J., Dommer, M., Chang, C., et al. Piezoelectric nanofibers for energy scavenging applications. Nano Energy, 2012, 1(3): 356-371.

Chen, S., Yang, W., Song, J., et al. A new mechanism of energy dissipation in nanomechanical resonators due to the Casimir force. Journal of Applied Physics, 2019, 126(4): 044502.

Curry, E. J., Le, T. T., Das, R., et al. Biodegradable nanofiber-based piezoelectric transducer. Proceedings of the National Academy of Sciences, 2020, 117(1): 214-220.

Daeichin, M., Miles, R., Towfighian, S. Lateral pull-in instability of electrostatic MEMS transducers employing repulsive force. Nonlinear Dynamics, 2020, 100(3): 1927-1940.

Fang, X., Li, X., Hu, K., et al. Destructive reliability analysis of electromagnetic MEMS micromirror under vibration environment. IEEE Journal of Selected Topics in Quantum Electronics, 2022, 28(5): 1-8.

Guo, J., Zhou, L., Zhao, Y. Instability analysis of torsional MEMS/NEMS actuators under capillary force. Journal of Colloid and Interface Science, 2009, 331(2): 458-462.

Ico, G., Showalter, A., Bosze, W., et al. Size-dependent piezoelectric and mechanical properties of electrospun P(VDF-TrFE) nanofibers for enhanced energy harvesting. Journal of Materials Chemistry A, 2016, 4(6): 2293-2304.

Jariwala, T., Ico, G., Tai, Y., et al. Mechano-responsive piezo-electric nanofiber as an on-demand drug delivery vehicle. ACS Applied Bio Materials, 2021, 4(4): 3706-3715.

Khatami, F., Rezazadeh, G. Dynamic response of a torsional micromirror to electrostatic force and mechanical shock. Microsystem Technologies, 2009, 15(4): 535-545.

Kumar, A., Kumar, P., Bajpai, A., et al. Design and development of a double-bridge micromirror with bending and twisting cantilevers for multiobject spectroscopy. IEEE Transactions on Electron Devices, 2020, 67(10): 4392-4398.

Lamoreaux, S. K. Demonstration of the Casimir force in the 0.6 to 6 µ m range. Physical Review Letters, 1997, 78(1): 5-8.

Le, T. T., Curry, E. J., Vinikoor, T., et al. Piezoelectric nanofiber membrane for reusable, stable, and highly functional face mask filter with long-term biodegradability. Advanced Functional Materials, 2022, 32: 2113040.

Li, Y., Yu, D., Niu, B. Prediction of spontaneous imbibition in fractal porous media based on modified porosity cor-relation. Capillarity, 2021, 4(1): 13-22.

Liang, J., Andersen, P. Ø., Zhou, J., et al. Applications of mercury intrusion capillary pressure for pore structures: A review. Capillarity, 2020, 3(4): 62-74.

Masoumi, A., Amiri, A., Vesal, R., et al. Nonlinear static pull-in instability analysis of smart nano-switch considering flexoelectric and surface effects via DQM. Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 2021, 235(24): 7821-7835.

Opreni, A., Boni, N., Carminati, R., et al. Analysis of the non-linear response of piezo-micromirrors with the harmonic balance method. Actuators MDPI, 2021, 10(2): 21-32.

Pal, P., Swarnalatha, V., Rao, A. V. N., et al. High speed silicon wet anisotropic etching for applications in bulk micromachining: A review. Micro and Nano Systems Letters, 2021, 9(1): 1-59.

Sun, J., Li, Z., Furtado, F., et al. A microfluidic study of transient flow states in permeable media using fluorescent particle image velocimetry. Capillarity, 2021, 4(4): 76-86.

Takabayashi, A. Y., Sattari, H., Edinger, P., et al. Broad-band compact single-pole double-throw silicon photonic MEMS switch. Journal of Microelectromechanical Systems, 2021, 30(2): 322-329.

Tang, Y., Li, J., Xu, L., et al. Review of electrothermal micromirrors. Micromachines, 2022, 13(3): 429-455.

Tian, D., Ain, Q. T., Anjum, N., et al. Fractal N/MEMS: From pull-in instability to pull-in stability. Fractals, 2021, 29(2): 2150030.

Tian, D., He, C. A fractal micro-electromechanical system and its pull-in stability. Journal of Low Frequency Noise, Vibration and Active Control, 2021, 40(3): 1380-1386.

Tian, Y., Daeichin, M., Towfighian, S. Dynamic behavior of T-beam resonator with repulsive actuation. Nonlinear Dynamics, 2022, 107(1): 15-31.

van Zwol, P. J., Palasantzas, G., De Hosson, J. Th. Influence of roughness on capillary forces between hydrophilic surfaces. Physical Review E, 2008, 78(3): 031606.

Wang, J., Zhang, G., You, Z. Design rules for dense and rapid Lissajous scanning. Microsystems and Nanoengineering, 2020, 6(1): 1-7.

Xu, Q., Younis, M. I. Micromachined threshold inertial switches: A review. Journal of Micromechanics and Microengineering, 2022, 32(6): 063001.

Yang, W., Ding, W., Liu, M., et al. A theoretical model of a flexible capacitive pressure sensor with microstructured electrodes for highly sensitive electronic skin. Journal of Physics D: Applied Physics, 2021, 55(9): 94001.

Yang, W., Kang, W., Wang, X. Scale-dependent pull-in instability of functionally graded carbon nanotubes-reinforced piezoelectric tuning nano-actuator considering finite temperature and conductivity corrections of Casimir force. Composite Structures, 2017a, 176(9): 460-470.

Yang, W., Li, Y., Wang, X. Scale-dependent dynamic-pull-in of functionally graded carbon nanotubes reinforced nanodevice with piezoelectric layer. Journal of Aerospace Engineering, 2017b, 30(3): 04016096.

Yang, W., Li, Y., Wang, X. Tunable electromechanical coupling of a carbon nanotube-reinforced variable cross-section nanoswitch with a piezoelectric effect. Journal of Physics D: Applied Physics, 2016, 49(33): 335304.

Yang, W., Liu, M., Ying, L., et al. Coupled effects of surface interaction and damping on electromechanical stability of functionally graded nanotubes reinforced torsional micromirror actuator. The Journal of Strain Analysis for Engineering Design, 2022, 57(5): 360-376.

Yang, W., Yang, F., Wang, X. Dynamic instability and bifurcation of electrically actuated circular nanoplate considering surface behavior and small scale effect. International Journal of Mechanical Sciences, 2017c, 126: 12-23.

Zhang, X., Koppal, S. J., Zhang, R., et al. Wide-angle structured light with a scanning MEMS mirror in liquid. Optics Express, 2016, 24(4): 3479-3487.


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